Technologies and Materials for Micro and Nano-electronics
نویسنده
چکیده
In the article technologies used in micro and nanoelectronics there are shortly described. Attention is devoted to lithography as a basic technology. Principles of electron and ion lithography are mentioned as well as progressive ion projection lithography. Some remarks to nanotubes as means of cold cathodes for vacuum electron tubes for nanoelectronics are presented.
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